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- Title:
NC-SI AND A-SI - KINETICS AND MECHANISM OF THE DEPOSITION AND THE CONTROL OF THE MATERIAL PROPERTIES - A REVIEW OF RECENT RESULTS
- Author(s):
- VEPREK, S; KONUMA, M; SAROTT, FA; al., et
- Journal title:
- HELVETICA PHYSICA ACTA
- Year:
- 1987
- Journal volume:
- 60
- Journal issue:
- 2
- Pages contribution:
- 185-185
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