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- Titel:
SURFACE PROCESSES AND RATE-DETERMINING STEPS IN PLASMA-INDUCED CHEMICAL VAPOR-DEPOSITION - TITANIUM NITRIDE, BORON-CARBIDE AND SILICON
- Autor(en):
- VEPREK, S
- Zeitschriftentitel:
- SURFACE & COATINGS TECHNOLOGY
- Jahr:
- 1990
- Band / Volume:
- 43-4
- Heft / Issue:
- 1-3
- Seitenangaben Beitrag:
- 154-166
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