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- Title:
TEMPERATURE-DEPENDENCE OF THE CRYSTALLITE SIZE AND CRYSTALLINE FRACTION OF MICROCRYSTALLINE SILICON DEPOSITED FROM SILANE BY PLASMA CVD
- Author(s):
- VEPREK, S; SAROTT, FA; RUCKSCHLOSS, M
- Journal title:
- JOURNAL OF NON-CRYSTALLINE SOLIDS
- Year:
- 1991
- Journal volume:
- 137
- Pages contribution:
- 733-736
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