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Title:

CHALLENGES AND CONFUSIONS IN THE KINETICS AND MECHANISM OF PLASMA INDUCED DEPOSITION OF A-GE-H AND MU-C-GE-H

Author(s):
VEPREK, S; GLATZ, F; KONWITSCHNY, R
Journal title:
JOURNAL OF NON-CRYSTALLINE SOLIDS
Year:
1991
Journal volume:
137
Pages contribution:
779-782
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