Login
- Title:
MECHANISM OF CLUSTER FORMATION IN A CLEAN SILANE DISCHARGE
- Author(s):
- VEPREK, S; SCHOPPER, K; AMBACHER, O; al., et
- Journal title:
- JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- Year:
- 1993
- Journal volume:
- 140
- Journal issue:
- 7
- Pages contribution:
- 1935-1942
BibTeX