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- Titel:
NOVEL BROMINATED CARBOSILANE PRECURSORS FOR LOW-TEMPERATURE HETEROEPITAXY OF BETA-SIC AND THEIR COMPARISON WITH METHYLTRICHLOROSILANE
- Autor(en):
- KUNSTMANN, T; ANGERER, H; KNECHT, J; al., et
- Zeitschriftentitel:
- CHEMISTRY OF MATERIALS
- Jahr:
- 1995
- Band / Volume:
- 7
- Heft / Issue:
- 9
- Seitenangaben Beitrag:
- 1675-1679
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