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- Title:
PLASMA CHEMICAL-VAPOR-DEPOSITION AND PROPERTIES OF HARD C3N4 THIN-FILMS
- Author(s):
- VEPREK, S; WEIDMANN, J; GLATZ, F
- Journal title:
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
- Year:
- 1995
- Journal volume:
- 13
- Journal issue:
- 6
- Pages contribution:
- 2914-2919
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