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- Title:
NOVEL BROMINATED CARBOSILANE PRECURSORS FOR LOW-TEMPERATURE HETEROEPITAXY OF BETA-SIC AND THEIR COMPARISON WITH METHYLTRICHLOROSILANE
- Author(s):
- KUNSTMANN, T; ANGERER, H; KNECHT, J; al., et
- Journal title:
- CHEMISTRY OF MATERIALS
- Year:
- 1995
- Journal volume:
- 7
- Journal issue:
- 9
- Pages contribution:
- 1675-1679
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