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- Title:
HETEROEPITAXY OF BETA-SIC FROM METHYLTRICHLOROSILANE AND METHYLTRIBROMOSILANE ON SI(100) WITHOUT A CARBON BUFFER LAYER
- Author(s):
- KUNSTMANN, T; VEPREK, S
- Journal title:
- APPLIED PHYSICS LETTERS
- Year:
- 1995
- Journal volume:
- 67
- Journal issue:
- 21
- Pages contribution:
- 3126-3128
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