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- Title:
Chemical vapor deposition of 3C-SiC on Si(100) from methyltrichlorosilane and methyltribromosilane
- Author(s):
- KUNSTMANN, T; VEPREK, S; SCHMIDBAUR, H; al., et
- Journal title:
- SILICON CARBIDE AND RELATED MATERIALS 1995
- Year:
- 1996
- Journal volume:
- 142
- Pages contribution:
- 213-216
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