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Title:

In situ XPS studies of the deposition of TiNxCy films from tetrakis(dimethylamido)titanium(IV) and bis[N,N'-bis(tert-butyl)ethylenediamido]titanium(IV)

Author(s):
RUHL, G; REHMET, R; KNIZOVA, M; al., et
Journal title:
CHEMISTRY OF MATERIALS
Year:
1996
Journal volume:
8
Journal issue:
12
Pages contribution:
2712-2720
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