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- Title:
Selective deposition of amorphous germanium on Si with respect to SiO2 by organometallic CVD
- Author(s):
- PROKOP, J; MERICA, R; GLATZ, F; al., et
- Journal title:
- JOURNAL OF NON-CRYSTALLINE SOLIDS
- Year:
- 1996
- Journal volume:
- 200
- Pages contribution:
- 1026-1028
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