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- Titel:
Structure and photoluminescence features of nanocrystalline Si/SiO2 films produced by plasma chemical vapor deposition and post-treatment
- Autor(en):
- WU, XC; OSSADNIK, C; EGGS, C; al., et
- Zeitschriftentitel:
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Jahr:
- 2002
- Band / Volume:
- 20
- Heft / Issue:
- 4
- Seitenangaben Beitrag:
- 1368-1378
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