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Title:

Structure and photoluminescence features of nanocrystalline Si/SiO2 films produced by plasma chemical vapor deposition and post-treatment

Author(s):
WU, XC; OSSADNIK, C; EGGS, C; al., et
Journal title:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Year:
2002
Journal volume:
20
Journal issue:
4
Pages contribution:
1368-1378
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