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Title:

Internal friction and Young's modulus of the nc-TiN/a-Si3N4 films prepared by reactive magnetron sputtering method

Author(s):
LI, ZS; WANG, XP; FANG, QF; al., et
Journal title:
ACTA METALLURGICA SINICA
Year:
2003
Journal volume:
39
Journal issue:
11
Pages contribution:
1193-1196
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