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- Title:
Internal friction and Young's modulus of the nc-TiN/a-Si3N4 films prepared by reactive magnetron sputtering method
- Author(s):
- LI, ZS; WANG, XP; FANG, QF; al., et
- Journal title:
- ACTA METALLURGICA SINICA
- Year:
- 2003
- Journal volume:
- 39
- Journal issue:
- 11
- Pages contribution:
- 1193-1196
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