NC-SI AND A-SI - KINETICS AND MECHANISM OF THE DEPOSITION AND THE CONTROL OF THE MATERIAL PROPERTIES - A REVIEW OF RECENT RESULTS

Titel:: NC-SI AND A-SI - KINETICS AND MECHANISM OF THE DEPOSITION AND THE CONTROL OF THE MATERIAL PROPERTIES - A REVIEW OF RECENT RESULTS
Autor(en):: VEPREK, S; KONUMA, M; SAROTT, FA; al., et
Zeitschriftentitel:: HELVETICA PHYSICA ACTA
Jahr:: 1987
Band / Volume:: 60
Heft / Issue:: 2
Seitenangaben Beitrag:: 185-185
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