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1989
record00115
Author(s):
VEPREK, S
Title:
CONTROVERSIES IN THE SUGGESTED MECHANISMS OF PLASMA-INDUCED DEPOSITION OF SILICON FROM SILANE
Journal title:
THIN SOLID FILMS
Year:
1989
Journal volume:
175
Pages contribution:
129-139
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mediaTUM Gesamtbestand
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TUM School of Natural Sciences
Ehemalige Einrichtungen
Institut für Chemie Anorganischer Materialien (Prof. Veprek)
1989
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