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- Title:
Development of novel coating technology by vacuum arc with rotating cathodes for industrial production of nc-(Al1-xTix)N/a-Si3N4 superhard nanocomposite coatings for dry, hard machining
- Author(s):
- JILEK, M; CSELLE, T; HOLUBAR, P; al., et
- Journal title:
- PLASMA CHEMISTRY AND PLASMA PROCESSING
- Year:
- 2004
- Journal volume:
- 24
- Journal issue:
- 4
- Pages contribution:
- 493-510
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