Development of novel coating technology by vacuum arc with rotating cathodes for industrial production of nc-(Al1-xTix)N/a-Si3N4 superhard nanocomposite coatings for dry, hard machining

Titel:: Development of novel coating technology by vacuum arc with rotating cathodes for industrial production of nc-(Al1-xTix)N/a-Si3N4 superhard nanocomposite coatings for dry, hard machining
Autor(en):: JILEK, M; CSELLE, T; HOLUBAR, P; al., et
Zeitschriftentitel:: PLASMA CHEMISTRY AND PLASMA PROCESSING
Jahr:: 2004
Band / Volume:: 24
Heft / Issue:: 4
Seitenangaben Beitrag:: 493-510
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