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- Title:
ROLE OF HIGHER SILANES IN THE PLASMA-INDUCED DEPOSITION OF AMORPHOUS-SILICON FROM SILANE
- Author(s):
- HEINTZE, M; VEPREK, S
- Journal title:
- APPLIED PHYSICS LETTERS
- Year:
- 1989
- Journal volume:
- 54
- Journal issue:
- 14
- Pages contribution:
- 1320-1322
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