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Title:

"Non-linear model for the simulation of viscously damped RF-MEMS switches at varying ambient pressure conditions"

Document type:
Konferenzbeitrag
Author(s):
Niessner, M. ; Schrag, G. ; Wachutka, G.; Iannacci, J. ; Reutter, T. ; Mulatz, H.
Pages contribution:
pp. 618-621
Book / Congress title:
Proceedings of EUROSENSORS XXIII
Congress (additional information):
September 6-9, 2009, Lausanne, Schweiz
Year:
2009
Language:
en
Format:
Text
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