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Title:

Inspired by Nature: Efficient Piezoelectric MEMS Actuator Based on Wavelike Excitation

Document type:
Konferenzbeitrag
Author(s):
Behlert, R.; Schrag, G.
Book / Congress title:
20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Date of congress:
23- 27.06
Year:
2019
Fulltext / DOI:
doi:10.1109/TRANSDUCERS.2019.8808290
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