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Title:

Enhanced Fluid Flow by Wavelike Excitation of a Micromechanical Bending Actuator

Document type:
Konferenzbeitrag
Author(s):
Hölzl, W.; Behlert, R.; Gehring, M. and Schrag, G.
Book / Congress title:
20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Date of congress:
23- 27.06
Year:
2019
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