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- Title:
COMPACT MODEL FOR THE STATIC AND DYNAMIC BEHAVIOR OF A PIEZOELECTRIC BIMORPH ACTUATOR FOR MICROFLUIDIC MEMS
- Document type:
- Konferenzbeitrag
- Author(s):
- Rumschoettel, D.; Kagerer, M.; Lueth, T.C.; Irlinger, F.
- Book / Congress title:
- ASME 2014 International Mechanical Engineering Congress & Exposition (IMECE 2014)
- Year:
- 2014
- Covered by:
- ; Scopus; Web of Science
- Language:
- en
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