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Title:

High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

Author(s):
Jílek, M., Jr.; Jílek, M.; Mendez Martin, F.; Mayrhofer, P.H.; Veprek, S.
Journal title:
Thin Solid Films
Year:
2014
Journal volume:
556
Pages contribution:
361-368
Fulltext / DOI:
doi:10.1016/j.tsf.2014.01.059
Publisher:
Elsevier BV
Date of publication:
01.04.2014
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