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- Title:
High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering
- Author(s):
- Jílek, M., Jr.; Jílek, M.; Mendez Martin, F.; Mayrhofer, P.H.; Veprek, S.
- Journal title:
- Thin Solid Films
- Year:
- 2014
- Journal volume:
- 556
- Pages contribution:
- 361-368
- Fulltext / DOI:
- doi:10.1016/j.tsf.2014.01.059
- Publisher:
- Elsevier BV
- Date of publication:
- 01.04.2014
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