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Title:

Theoretical and Experimental Investigations on Failure Mechanisms Occuring During Long-Term Cycling of Electrostatic Actuators

Document type:
Konferenzbeitrag
Author(s):
Behlert, R.: Künzig, T.; Schrag, G.: Wachutka, G.
Editor:
IEEE
Book / Congress title:
15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
Congress (additional information):
EuroSimE 2014
Date of congress:
April, 7-9
Year:
2014
E-ISBN:
978-1-4799-4790-4
Reviewed:
ja
Language:
en
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