User: Guest  Login
Document type:
Konferenzbeitrag 
Author(s):
Schrag, G.; Reutter, T.; Wachutka, G. 
Title:
Finite Element Simulations Combined with Statistical Analysis of Variance: Exploring the Potential of Piezoelectric MEMS Microphones 
Pages contribution:
pp. 1452-1455 
Book / Congress title:
Proceedings of the 17th International Conference on Solid State Sensors, Actuators and Microsystems 
Congress (additional information):
TRANSDUCERS 16-20 June, 2013, Barcelona, Spain 
Publisher:
IEEE 
Year:
2013 
Language:
en