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- Title:
An Energy Harvester Concept for Electrostatic Conversion Manufactured in MEMS Surface Micromachining Technology
- Document type:
- Konferenzbeitrag
- Author(s):
- Iannacci, J.; Sordo, G.; Gotthardi, M.; Künzig, T.; Schrag, G., Wachutka, G.
- Book / Congress title:
- Proceedings of the International Semiconductor Conference Dresden-Grenoble
- Congress (additional information):
- ISCDG 2013, September 26-27, Dresden Germany
- Year:
- 2013
- Language:
- en
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