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- Title:
Limits to the preparation of superhard nanocomposites: Impurities, deposition and annealing temperature
- Author(s):
- VEPREK, S.; Veprek-Heijman, M. G. J.
- Abstract:
- Impurities, in particularly oxygen, degrade the mechanical properties of superhard nc-TiN/a-Si3N4 nanocomposites. In the present paper we show that relatively small oxygen impurities also hinder the diffusion and already at a level of about >= 0.8 at.
- Journal title:
- THIN SOLID FILMS
- Year:
- 2012
- Journal volume:
- 522
- Pages contribution:
- 274--282
- Fulltext / DOI:
- doi:10.1016/j.tsf.2012.08.048
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