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Titel:

Limits to the preparation of superhard nanocomposites: Impurities, deposition and annealing temperature

Autor(en):
VEPREK, S.; Veprek-Heijman, M. G. J.
Abstract:
Impurities, in particularly oxygen, degrade the mechanical properties of superhard nc-TiN/a-Si3N4 nanocomposites. In the present paper we show that relatively small oxygen impurities also hinder the diffusion and already at a level of about >= 0.8 at.
Zeitschriftentitel:
THIN SOLID FILMS
Jahr:
2012
Band / Volume:
522
Seitenangaben Beitrag:
274--282
Volltext / DOI:
doi:10.1016/j.tsf.2012.08.048
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