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- Title:
Non-Contact Roughness Measurement in Sub-Micron Range by Considering Depolarization Effects
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Pöller, F.; Salazar Bloise, F.; Jakobi, M.; Wang, S.; Dong, J.; Koch, A.W.
- Journal title:
- Sensors
- Year:
- 2019
- Journal issue:
- 19 / 10
- Pages contribution:
- 1-12
- Reviewed:
- ja
- Fulltext / DOI:
- doi:10.3390/s19102215
- WWW:
- https://www.mdpi.com/1424-8220/19/10/2215/htm
- TUM Institution:
- Lehrstuhl für Messsystem- und Sensortechnik
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