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- Document type:
- Konferenzbeitrag
- Author(s):
- Goswami, S.; Bretthauer, C.; Bogner, A.; Basavana, A.; Anzinger, S.; Haubold, M.; Lorenz, G.; Strasser, J.; Weber, D.; Servadei, L.; Wille, R.
- Title:
- MEMS-based Vibration Sensor in Single-Backplate Technology
- Book / Congress title:
- IEEE SENSORS
- Year:
- 2022
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