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- Document type:
- Konferenzbeitrag
- Author(s):
- Chryssikos, Domenikos; Heigl, Martin; Kounoupioti, Evanthia; Neumeier, Karl; Wieland, Robert; Tornow, Marc /
- Title:
- Scalable fabrication of metallic nanogaps using CMOS-based 10 nm spacer lithography
- Book / Congress title:
- 2022 IEEE 22nd International Conference on Nanotechnology (NANO)
- Publisher:
- IEEE
- Date of publication:
- 04.07.2022
- Year:
- 2022
- Fulltext / DOI:
- doi:10.1109/nano54668.2022.9928620
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