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- Title:
Improvement of Roughness Measurement in Sub-micron Ranges Using Contrast-based Depolarization Field Components
- Document type:
- Konferenzbeitrag
- Contribution type:
- Vortrag / Präsentation
- Author(s):
- Pöller, F.; Salazar Bloise F.; Jakobi, M.; Dong, J.; Koch, A.W.
- Pages contribution:
- S.173-S.183
- Book / Congress title:
- OCM 2021 - Optical Characterization of Materials: Conference Proceedings
- Date of congress:
- 17.03.2021 – 18.03.2021
- Date of publication:
- 17.03.2021
- Year:
- 2021
- Fulltext / DOI:
- doi:10.5445/KSP/1000128686
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