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Titel:

A CMOS Temperature Stabilized 2-D Mechanical Stress Sensor With 11-bit Resolution

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Umidjon Nurmetov, Tobias Fritz, Ernst Müllner, Christopher M. Dougherty, Michael Szelong,Franz Kreupl, and Ralf Brederlow
Abstract:
Using an unmodified 130-nm CMOS process,we present the design of an integrated 2-D CMOS stress sensorand trim methodology resulting in 11-bit resolution and 66-dBdynamic range. The n-well-only primary sensing elements andp-type auxiliary elements allow post-calibrated measurement ofboth stress magnitude and angle over the commercial tempera-ture range from 5◦Cto90◦C. The implementation is robust toprocess variation, requires 357μW when active, and is optimizedfor duty cycling to reduce system e...     »
Zeitschriftentitel:
IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 55, NO. 4, APRIL 202
Jahr:
2020
Nachgewiesen in:
Scopus
Sprache:
en
Volltext / DOI:
doi:10.1109/JSSC.2020.2967554
WWW:
https://ieeexplore.ieee.org/abstract/document/8984225
TUM Einrichtung:
Hybride Elektronische Systeme
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