Dimensional stability of substrate films: an essential requirement for the deposition of functional layers?

Titel:: Dimensional stability of substrate films: an essential requirement for the deposition of functional layers?
Dokumenttyp:: Zeitschriftenaufsatz
Autor(en):: Miesbauer, O.; Noller, K.
Zeitschriftentitel:: Converting Quarterly
Jahr:: 2016
Heft / Issue:: 4
Seitenangaben Beitrag:: 42--47
BibTeX

Vorkommen: