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- Title:
A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution,
- Document type:
- Konferenzbeitrag
- Author(s):
- U. Nurmetov, T. Fritz, E. Muellner, C. Dougherty, F. Kreupl , R. Brederlow
- Abstract:
- An integrated 11-bit 2-D CMOS stress sensor is presented with 66dB of dynamic range, measuring -100 to 360MPa, and < 1LSB error over temperature from 5ºC to 90ºC. N-Well-based primary elements enable accurate sensing of stress magnitude and angle, and allow repeatable error compensatio
- Editor:
- IEEE
- Book / Congress title:
- 2019 Symposia on VLSI Technology and Circuits
- Organization:
- IEEE
- Date of congress:
- 10.6.2019
- Year:
- 2019
- Covered by:
- Scopus
- Reviewed:
- ja
- Language:
- en
- Publication format:
- WWW
- Fulltext / DOI:
- doi:10.23919/VLSIC.2019.8778132
- TUM Institution:
- Hybride Elektronische Systeme
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