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Document type:
Konferenzbeitrag
Contribution type:
Textbeitrag / Aufsatz
Author(s):
Aulbach, L.; Pöller, F.; Lu, M.; Wang, S.; Koch, A.W.
Title:
Optical mapping of surface roughness by implementation of a spatial light modulator
Book / Congress title:
Proc. SPIE Volume 10373, Applied Optical Metrology II
Organization:
SPIE
Date of publication:
23.08.2017
Year:
2017
Quarter:
3. Quartal
Year / month:
2017-08
Month:
Aug
Reviewed:
ja
Language:
en
Publication format:
Print
Fulltext / DOI:
doi:10.1117/12.2270548
WWW:
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10373/103730E/Optical-mapping-of-surface-roughness-by-implementation-of-a-spatial/10.1117/12.2270548.short?SSO=1
Semester:
SS 17
TUM Institution:
Lehrstuhl für Messsystem- und Sensortechnik
Format:
Text
Ingested:
02.01.2018
Last change:
08.02.2018
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