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Title:

Performance Improvement of Graphenic Carbon X-ray Transmission Windows

Document type:
Zeitschriftenaufsatz
Author(s):
Sebastian Huebner, Natsuki Miyakawa, Andreas Pahlke, Franz Kreupl
Abstract:
Graphenic carbon (GC) x-ray transmission windows for EDX and XRF applications with a high transparency for x-rays below 2.5 keV have been fabricated on 6 inch wafers with a CMOS-compatible CVD process. GC windows with an open diameter of 7.4 mm and a thickness of 770 nm withstand up to 6.5 bars of differential pressure. A high transmissivity of 40 % for fluorine Kα (0.677 keV) radiation is demonstrated for a GC thickness of 650 nm. The GC membranes outperform beryllium (Be) windows, in terms of...     »
Journal title:
MRS Advances
Year:
2016
Journal volume:
Available on CJO 2016 doi:10.1557/adv.2016.194
Year / month:
2016-03
Month:
Mar
Journal issue:
MRS Advances / FirstView Article / March 2016, pp 1 - 6 DOI: 10.1557/adv.2016.194, Published online: 14 March 2016
Pages contribution:
6
Covered by:
Scopus
Reviewed:
ja
Language:
en
Fulltext / DOI:
doi:10.1557/adv.2016.194
WWW:
http://journals.cambridge.org/abstract_S2059852116001948%2520
Publisher:
Cambridge University Press
Status:
Verlagsversion / published
TUM Institution:
Hybride Elektronische Systeme
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