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- Title:
VERTICAL INTERCONNECT STRUCTURE, MEMORY DEVICE AND ASSOCIATED PRODUCTION METHOD
- Document type:
- Patentanmeldung
- Patent application number:
- US 2011248234 (A1)
- Inventor:
- GUTSCHE MARTIN [DE]; KREUPL FRANZ [DE]; SEIDL HARALD [DE
- Assignee:
- GUTSCHE MARTIN [DE]; KREUPL FRANZ [DE]; SEIDL HARALD [DE
- Patent office:
- US
- Publication date application:
- 13.10.2011
- Year:
- 2011
- Language:
- en
- TUM Institution:
- Hybride Elektronische Systeme
- Format:
- Text
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