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- Title:
Vertical interconnect structure, memory device and associated production method
- Document type:
- Patent
- Patent number:
- US 7998858 B2
- Inventor:
- GUTSCHE MARTIN, DE ; KREUPL FRANZ, DE ; SEIDL HARALD, DE
- Assignee:
- GUTSCHE MARTIN, DE ; KREUPL FRANZ, DE ; SEIDL HARALD, DE
- Publication date patent:
- 16.08.2011
- Year:
- 2011
- Language:
- de
- TUM Institution:
- Hybride Elektronische Systeme
- Format:
- Text
BibTeX