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- Document type:
- Patent
- Patent number:
- US 7910210 B2
- Inventor:
- KREUPL FRANZ, DE LIEBAU MAIK, DE DUESBERG GEORG, DE KAPTEYN CHRISTIAN, DE
- Assignee:
- KREUPL FRANZ, DE LIEBAU MAIK, DE DUESBERG GEORG, DE KAPTEYN CHRISTIAN, DE
- Title:
- Method of producing a layer arrangement, method of producing an electrical component, layer arrangement, and electrical component
- Patent office:
- USA
- Publication date patent:
- 22.03.2011
- Year:
- 2011
- Language:
- de
- WWW:
- http://www.hes.ei.tum.de/index.php?id=13
- TUM Institution:
- Hybride Elektronische Systeme
- Format:
- Text
BibTeX