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- Patent application number:
- WO 2010/046340
- Inventor:
- Hirth, F.; Dudeck, S.; Jakobi, M.; Gerhard, D.
- Assignee:
- Hirth, F.; Dudeck, S.; Jakobi, M.; Gerhard, D.
- Title:
- Interferometry method for optically examining coatings
- Application number:
- WO 2010/046340
- Year:
- 2010
- Format:
- Text
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