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Title:

Interferometry method for optically examining coatings

Patent application number:
WO 2010/046340
Inventor:
Hirth, F.; Dudeck, S.; Jakobi, M.; Gerhard, D.
Assignee:
Hirth, F.; Dudeck, S.; Jakobi, M.; Gerhard, D.
Application number:
WO 2010/046340
Year:
2010
Format:
Text
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