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- Document type:
- Konferenzbeitrag
- Contribution type:
- Textbeitrag / Aufsatz
- Author(s):
- Hirth, F.; Pérez Grassi, A.; Dorigo, D.G.; Koch, A.W.:
- Title:
- Comparison of different film thickness evaluation algorithms applicable to spectrometric interrogation systems
- Book / Congress title:
- Conference on Interferometry XV: Techniques and Analysis, San Diego, California, USA, 02.08.2010
- Volume:
- Proc. SPIE, Vol. 7790, 77900V, 2010
- Year:
- 2010
- Reviewed:
- ja
- Language:
- en
- Semester:
- SS 10
- Format:
- Text
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