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- Document type:
- Konferenzbeitrag
- Author(s):
- Hirth, F.; Buck, T.C.; Rößner, M.; Jakobi, M.; Koch, A.W.
- Title:
- Impact of angle ranges on thickness resolution in thin film reflectometry
- Book / Congress title:
- ISOT 2009 - International Symposium on Optomechatronic Technologies
- Congress (additional information):
- 21.-23.09.2009, Istanbul, Turkey
- Year:
- 2009
- Language:
- en
- Format:
- Text
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