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- Title:
Hydrosilane‐Functionalized [2.2]Paracyclophane for Plasma‐Etch‐Resistant and Post‐Modifiable Poly(Para‐Xylylene)
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Bichlmaier, Lukas; Teshima, Tetsuhiko F.; Kostenko, Arseni; Boustani, George Al; Wilhelm, Rebecca; Stigler, Sebastian; Tanaka, Shuma; Onoe, Hiroaki; Wolfrum, Bernhard; Inoue, Shigeyoshi
- Journal title:
- Advanced Materials Interfaces
- Year:
- 2024
- Fulltext / DOI:
- doi:10.1002/admi.202400701
- Publisher:
- Wiley
- E-ISSN:
- 2196-73502196-7350
- Date of publication:
- 09.11.2024
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