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- Title:
Simulation of Anchor Loss in MEMS Resonators Using Perfectly Matched Layers
- Document type:
- Konferenzbeitrag
- Author(s):
- Schiwietz, Daniel; More, Laukik R.; Weig, Eva M.; Degenfeld-Schonburg, Peter
- Book / Congress title:
- 2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
- Publisher:
- IEEE
- Date of publication:
- 28.03.2023
- Year:
- 2023
- Fulltext / DOI:
- doi:10.1109/inertial56358.2023.10103970
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