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- Title:
Thin film interferometer using a light source with spectrally non-equidistantly distributed sampling points
- Document type:
- Konferenzbeitrag
- Author(s):
- Hirth, F.; Dudeck, S.; Jakobi, M.; Gerhard, D.; Koch, A.W.
- Book / Congress title:
- Proceedings of the SPIE Europe Optical Metrology Conference
- Congress (additional information):
- ICM-International Conference Centre Munich, 14.-18.06.2009, Munich, Germany
- Year:
- 2009
- Language:
- en
- Format:
- Text
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